Numerical Simulation of Phosphorus Removal from Silicon by Induction Vacuum Refining

被引：39

作者：

Zheng, Songsheng ^{[1
]}

Engh, Thorvald Abel ^{[2
]}

Tangstad, Merete ^{[2
]}

Luo, Xue-Tao ^{[1
]}

机构：

[1] Xiamen Univ, Dept Mat Sci & Engn, Xiamen 361005, Peoples R China

[2] Norwegian Univ Sci & Technol, Dept Mat Sci & Engn, N-7034 Trondheim, Norway

来源：

METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE | 2011年 / 42A卷 / 08期

关键词：

METALLURGICAL-GRADE SILICON; MOLTEN SILICON; THERMODYNAMIC PROPERTIES; FLUID VELOCITIES; MELTING FURNACES; PURIFICATION; CALCIUM;

D O I：

10.1007/s11661-011-0621-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Phosphorus can be expected to evaporate preferentially from silicon melt by induction vacuum refining (IVR). In the present study, on the assumption of phosphorus evaporating from silicon melt as gas species P and P (2), a numerical model of phosphorus removal from silicon by IVR was developed. The factors affecting phosphorus removal in decreasing order are temperature, chamber pressure, geometry of silicon melt, holding time, and original phosphorus concentration. Calculated phosphorus removal shows good agreement with the present experimental data.

引用

页码：2214 / 2225

页数：12

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