Stability of the reference flat used in Fizeau interferometer and its contribution to measurement uncertainty

被引：17
|
作者：
Takatsuji, T [1 ]
Osawa, S [1 ]
Kuriyama, Y [1 ]
Kurosawa, T [1 ]
机构：
[1] Natl Metrol Inst Japan, AIST Cent 3, Tsukuba, Ibaraki 3058563, Japan
来源：
RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS II | 2003年 / 5190卷
关键词：
flatness; interferometry; Fizeau interferometer; uncertainty;
D O I：
10.1117/12.505537
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Measurement uncertainty is an important topic for traceable measurements. Nevertheless not many literatures on the uncertainty of flatness measurements have been reported. In this paper, we report on this issue according to the Guide to the Expression of Uncertainty in Measurements (GUM). First stability of the reference optical flat used in Fizeau interferometer is discussed analytically, numerically, and experimentally. Then other uncertainty sources in actual measurements are investigated. As a result the uncertainty of flatness measurement of a large aperture flatness interferometer made by National Metrology Institute of Japan (NMIJ/AIST) is 1/77 wavelength.
引用
收藏
页码：431 / 439
页数：9
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