Ion beam smoothing with low-energy argon ions and reduction of Neel "orange peel" coupling in magnetic tunnel junctions

被引：10

作者：

Beck, PA ^{[1
]}

Roos, BFP ^{[1
]}

Demokritov, SO ^{[1
]}

Hillebrands, B ^{[1
]}

机构：

[1] Tech Univ Kaiserslautern, Fachbereich Phys & Forschungsschwerpunkt MINAS, D-67663 Kaiserslautern, Germany

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2005年 / 290卷

关键词：

interface roughness; magnetic coupling-interlayer; surface roughness; ion beam smoothing;

D O I：

10.1016/j.jmmm.2004.11.468

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The influence of low-energy argon bombardment with an ion energy of 30-70eV and normal incidence on the morphology of a 15-nm-thick Ni81Fe19 film on SiO2 has been studied at room temperature. Scanning tunneling microscope measurements show a reduction of the root-mean-square roughness of over 40%. For magnetic tunnel junctions prepared by involving ion-beam smoothing process, the Neel coupling is substantially reduced and measured by magneto-optic Kerr magnetometry. © 2004 Published by Elsevier B.V.

引用

页码：1108 / 1111

页数：4

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