Silicon nitride photonic platform for sensing applications

被引：0
|
作者：
Helin, Philippe [1 ]
Nga Pham [1 ]
Lenci, Silvia [2 ]
Chaudhuri, Ashesh Ray [2 ]
Firrincieli, Andrea [2 ]
Mannarino, Manuel [1 ]
机构：
[1] IMEC, SCD Dept, Leuven, Belgium
[2] IMEC, LST Dept, Leuven, Belgium
来源：
2019 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2019年
关键词：
Integrated photonics; silicon nitride; low loss; spectroscopy;
D O I：
10.1109/omn.2019.8925177
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports state-of-the-art values for a 200mm LPCVD silicon nitride platform in terms of low propagation loss 0.08dB/cm over a large wavelength range from 1550nm to 2150nm. This platform is specifically designed for sensing applications by providing a large oxide window opening to reveal the waveguide for interaction with a medium. Moreover, extra modules like reflector, heater and bond pads are added for more functionalities.
引用
收藏
页码：38 / 39
页数：2
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