High-density growth of horizontally aligned carbon nanotubes for interconnects

被引：19

作者：

Yan, F. ^{[1
]}

Zhang, C. ^{[1
]}

Cott, D. ^{[2
]}

Zhong, G. ^{[1
]}

Robertson, J. ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB3 0FA, England

[2] IMEC, B-3001 Louvain, Belgium

来源：

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2010年 / 247卷 / 11-12期

关键词：

carbon nanotube; chemical vapor deposition; horizontal growth; interconnect; electrical; CARRYING-CAPACITY; ELECTRODES; CIRCUITS;

D O I：

10.1002/pssb.201000134

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We demonstrate growth of horizontally aligned carbon nanotubes (CNTs) from a vertical, conductive surface for use as horizontal interconnects in integrated circuits. This is achieved by using a CMOS compatible metal, CoSi2, as the catalyst support and contact, and Fe as the catalyst. The Fe is patterned by tilt evaporation, and cold-wall chemical vapor deposition achieves a nanotube wall density of similar to 6 x 10(11) cm(-2). Electrical measurements show that both outer and some inner walls carry current, demonstrating a promising method for growing nanoscale horizontal interconnects. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

引用

页码：2669 / 2672

页数：4

共 50 条

[1] Combinatorial catalyst approach for high-density growth of horizontally aligned single-walled carbon nanotubes on sapphire
Ago, Hiroki
Nakamura, Yumiko
Ogawa, Yui
Tsuji, Masaharu
CARBON, 2011, 49 (01) : 176 - 186
[2] High-density horizontally aligned growth of carbon nanotubes with Co nanoparticles deposited by arc-discharge plasma method
Phokharatkul, D.
Ohno, Y.
Nakano, H.
Kishimoto, S.
Mizutani, T.
APPLIED PHYSICS LETTERS, 2008, 93 (05)
[3] High-density aligned carbon nanotubes with uniform diameters
Cao, PJ
Gu, YS
Liu, HW
Shen, F
Wang, YG
Zhang, QF
Wu, JL
Gao, HJ
JOURNAL OF MATERIALS RESEARCH, 2003, 18 (07) : 1686 - 1690
[4] High-density aligned carbon nanotubes with uniform diameters
P. J. Cao
Y. S. Gu
H. W. Liu
F. Shen
Y. G. Wang
Q. F. Zhang
J. L. Wu
H. J. Gao
Journal of Materials Research, 2003, 18 : 1686 - 1690
[5] Growth and characterization of high-density mats of single-walled carbon nanotubes for interconnects
Robertson, J.
Zhong, G.
Telg, H.
Thomsen, C.
Warner, J. H.
Briggs, G. A. D.
Dettlaff-Weglikowska, U.
Roth, S.
APPLIED PHYSICS LETTERS, 2008, 93 (16)
[6] Graphene/graphite sheet assisted growth of high-areal-density horizontally aligned carbon nanotubes
Xie, Huanhuan
Zhang, Rufan
Zhang, Yingying
Zhang, Wenlin
Jian, Muqiang
Wang, Chunya
Wang, Qi
Wei, Fei
CHEMICAL COMMUNICATIONS, 2014, 50 (76) : 11158 - 11161
[7] Growth of high-density horizontally aligned SWNT arrays using Trojan catalysts
Yue Hu
Lixing Kang
Qiuchen Zhao
Hua Zhong
Shuchen Zhang
Liangwei Yang
Zequn Wang
Jingjing Lin
Qingwen Li
Zhiyong Zhang
Lianmao Peng
Zhongfan Liu
Jin Zhang
Nature Communications, 6
[8] Growth of high-density horizontally aligned SWNT arrays using Trojan catalysts
Hu, Yue
Kang, Lixing
Zhao, Qiuchen
Zhong, Hua
Zhang, Shuchen
Yang, Liangwei
Wang, Zequn
Lin, Jingjing
Li, Qingwen
Zhang, Zhiyong
Peng, Lianmao
Liu, Zhongfan
Zhang, Jin
NATURE COMMUNICATIONS, 2015, 6
[9] Nano-seeding catalysts for high-density arrays of horizontally aligned carbon nanotubes with wafer-scale uniformity
Xie, Ying
Li, Yue
Peng, Zhisheng
Wang, Chengyu
Qiu, Zanlin
Cai, Xinyi
Song, Tinglu
Si, Jia
Zhao, Xiaoxu
Qian, Liu
Zhao, Ziqiang
Zhang, Jin
NATURE COMMUNICATIONS, 2025, 16 (01)
[10] High-density growth of vertically aligned carbon nanotubes with high linearity by catalyst preheating in acetylene atmosphere
Yoshihara, Kumiko
Honda, Shin-Ichi
Lee, Jung-Goo
Mori, Hirotaro
Oura, Kenjiro
Katayama, Mitsuhiro
Japanese Journal of Applied Physics, 2008, 47 (4 PART 1): : 1941 - 1943

← 1 2 3 4 5 →