A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging

被引：13

作者：

Chen, J ^{[1
]}

Engel, J ^{[1
]}

Chen, NN ^{[1
]}

Liu, C ^{[1
]}

机构：

[1] Univ Illinois, Micro & Nanotechnol Lab, Urbana, IL USA

来源：

MEMS 2005 Miami: Technical Digest | 2005年

关键词：

D O I：

10.1109/MEMSYS.2005.1453926

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report the development of an out-of-plane hot-wire flow sensor array fabricated using robust three-dimensional assembly. The sensor is monolithically integrated with a commercial JFET operational amplifier and operates in constant temperature mode. Output response to airflow has been measured and we have applied the hot-wire anemometer array for flow imaging.

引用

页码：299 / 302

页数：4

共 8 条

[1] Development and characterization of surface micromachined, out-of-plane hot-wire anemometer [J].