Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

被引：166

作者：

Munoz, Pascual ^{[1
,2
]}

Mico, Gloria ^{[1
]}

Bru, Luis A. ^{[1
]}

Pastor, Daniel ^{[1
]}

Perez, Daniel ^{[1
]}

Domenech, Jose David ^{[2
]}

Fernandez, Juan ^{[2
]}

Banos, Rocio ^{[2
]}

Gargallo, Bernardo ^{[2
]}

Alemany, Ruben ^{[1
]}

Sanchez, Ana M. ^{[3
]}

Cirera, Josep M. ^{[3
]}

Mas, Roser ^{[3
]}

Dominguez, Carlos ^{[3
]}

机构：

[1] Univ Politecn Valencia, Photon Res Labs, C Camino Vera S-N, Valencia 46021, Spain

[2] VLC Photon SL, R&D Dept, C Camino Vera S-N, Valencia 46021, Spain

[3] CSIC, IMB, CNM, GTQ, Barcelona 08193, Spain

来源：

SENSORS | 2017年 / 17卷 / 09期

基金：

欧盟地平线“2020”;

关键词：

silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer; FREQUENCY COMB GENERATION; WAVE-GUIDE IMMUNOSENSOR; SUPERCONTINUUM GENERATION; REFRACTIVE-INDEX; HIGH-CONFINEMENT; PERFORMANCE; MODULATION; FILMS;

D O I：

10.3390/s17092088

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

引用

页数：25

共 50 条

[41] Generation of parabolic similaritons in tapered silicon photonic wires: comparison of pulse dynamics at telecom and mid-infrared wavelengths [J].

Lavdas, Spyros ;

Driscoll, Jeffrey B. ;

Jiang, Hongyi ;

Grote, Richard R. ;

Osgood, Richard M., Jr. ;

Panoiu, Nicolae C. .

OPTICS LETTERS, 2013, 38 (19) :3953-3956

[42] Germanium-on-silicon Vernier-effect photonic microcavities for the mid-infrared [J].

Troia, Benedetto ;

Penades, Jordi Soler ;

Khokhar, Ali Z. ;

Nedeljkovic, Milos ;

Alonso-Ramos, Carlos ;

Passaro, Vittorio M. N. ;

Mashanovich, Goran Z. .

OPTICS LETTERS, 2016, 41 (03) :610-613

[43] Mid-infrared photonic gas sensing using a silicon waveguide and an integrated emitter [J].

Consani, C. ;

Ranacher, C. ;

Tortschanoff, A. ;

Grille, T. ;

Irsigler, P. ;

Jakoby, B. .

SENSORS AND ACTUATORS B-CHEMICAL, 2018, 274 :60-65

[44] Nonlinear absorption and refraction in crystalline silicon in the mid-infrared [J].

Gai, Xin ;

Yu, Yi ;

Kuyken, Bart ;

Ma, Pan ;

Madden, Steve J. ;

Van Campenhout, Joris ;

Verheyen, Peter ;

Roelkens, Gunther ;

Baets, Roel ;

Luther-Davies, Barry .

LASER & PHOTONICS REVIEWS, 2013, 7 (06) :1054-1064

[45] Optimization of silicon on silica waveguides for mid-infrared applications at 4.28 μm [J].

Sobhy, Mina ;

Gad, Michael ;

Sabry, Yasser M. ;

Khalil, Diaa .

SILICON PHOTONICS XIV, 2019, 10923

[46] Germanium-based integrated photonics from near-to mid-infrared applications [J].

Marris-Morini, Delphine ;

Vakarin, Vladyslav ;

Ramirez, Joan Manel ;

Liu, Qiankun ;

Ballabio, Andrea ;

Frigerio, Jacopo ;

Montesinos, Miguel ;

Alonso-Ramos, Carlos ;

Le Roux, Xavier ;

Serna, Samuel ;

Benedikovic, Daniel ;

Chrastina, Daniel ;

Vivien, Laurent ;

Isella, Giovanni .

NANOPHOTONICS, 2018, 7 (11) :1781-1793

[47] Visible, near-infrared and infrared optical properties of silica aerogels [J].

Fu, Tairan ;

Tang, Jiaqi ;

Chen, Kai ;

Zhang, Fan .

INFRARED PHYSICS & TECHNOLOGY, 2015, 71 :121-126

[48] Silicon waveguides for the mid-infrared wavelength region [J].

Mashanovich, G. Z. ;

Stankovic, S. ;

Yang, P. Y. ;

Teo, E. J. ;

Dell'Olio, F. ;

Passaro, V. M. N. ;

Bettiol, A. A. ;

Breese, M. B. H. ;

Reed, G. T. .

SILICON PHOTONICS III, 2008, 6898

[49] Sub-wavelength gratings in silicon photonic devices for mid-infrared spectroscopy and sensing [J].

Stirling, Callum J. ;

Nedeljkovic, Milos ;

Mitchell, Colin ;

Rowe, David J. ;

Mashanovich, Goran Z. .

PHOTONICS AND NANOSTRUCTURES-FUNDAMENTALS AND APPLICATIONS, 2024, 58

[50] Multivariate regional deep learning prediction of soil properties from near-infrared, mid-infrared and their combined spectra [J].

Nyawasha, Rumbidzai W. ;

Wadoux, Alexandre M. J. -C. ;

Todoroff, Pierre ;

Chikowo, Regis ;

Falconnier, Gatien N. ;

Lagorsse, Maeva ;

Corbeels, Marc ;

Cardinael, Remi .

GEODERMA REGIONAL, 2024, 37

← 1 2 3 4 5 →