Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

被引：155

作者：

Munoz, Pascual ^{[1
,2
]}

Mico, Gloria ^{[1
]}

Bru, Luis A. ^{[1
]}

Pastor, Daniel ^{[1
]}

Perez, Daniel ^{[1
]}

Domenech, Jose David ^{[2
]}

Fernandez, Juan ^{[2
]}

Banos, Rocio ^{[2
]}

Gargallo, Bernardo ^{[2
]}

Alemany, Ruben ^{[1
]}

Sanchez, Ana M. ^{[3
]}

Cirera, Josep M. ^{[3
]}

Mas, Roser ^{[3
]}

Dominguez, Carlos ^{[3
]}

机构：

[1] Univ Politecn Valencia, Photon Res Labs, C Camino Vera S-N, Valencia 46021, Spain

[2] VLC Photon SL, R&D Dept, C Camino Vera S-N, Valencia 46021, Spain

[3] CSIC, IMB, CNM, GTQ, Barcelona 08193, Spain

来源：

SENSORS | 2017年 / 17卷 / 09期

基金：

欧盟地平线“2020”;

关键词：

silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer; FREQUENCY COMB GENERATION; WAVE-GUIDE IMMUNOSENSOR; SUPERCONTINUUM GENERATION; REFRACTIVE-INDEX; HIGH-CONFINEMENT; PERFORMANCE; MODULATION; FILMS;

D O I：

10.3390/s17092088

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

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页数：25

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