Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

被引：155
|
作者：
Munoz, Pascual [1 ,2 ]
Mico, Gloria [1 ]
Bru, Luis A. [1 ]
Pastor, Daniel [1 ]
Perez, Daniel [1 ]
Domenech, Jose David [2 ]
Fernandez, Juan [2 ]
Banos, Rocio [2 ]
Gargallo, Bernardo [2 ]
Alemany, Ruben [1 ]
Sanchez, Ana M. [3 ]
Cirera, Josep M. [3 ]
Mas, Roser [3 ]
Dominguez, Carlos [3 ]
机构：
[1] Univ Politecn Valencia, Photon Res Labs, C Camino Vera S-N, Valencia 46021, Spain
[2] VLC Photon SL, R&D Dept, C Camino Vera S-N, Valencia 46021, Spain
[3] CSIC, IMB, CNM, GTQ, Barcelona 08193, Spain
来源：
SENSORS | 2017年 / 17卷 / 09期
基金：
欧盟地平线“2020”;
关键词：
silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer; FREQUENCY COMB GENERATION; WAVE-GUIDE IMMUNOSENSOR; SUPERCONTINUUM GENERATION; REFRACTIVE-INDEX; HIGH-CONFINEMENT; PERFORMANCE; MODULATION; FILMS;
D O I：
10.3390/s17092088
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
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页数：25
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