Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

被引：170

作者：

Munoz, Pascual ^{[1
,2
]}

Mico, Gloria ^{[1
]}

Bru, Luis A. ^{[1
]}

Pastor, Daniel ^{[1
]}

Perez, Daniel ^{[1
]}

Domenech, Jose David ^{[2
]}

Fernandez, Juan ^{[2
]}

Banos, Rocio ^{[2
]}

Gargallo, Bernardo ^{[2
]}

Alemany, Ruben ^{[1
]}

Sanchez, Ana M. ^{[3
]}

Cirera, Josep M. ^{[3
]}

Mas, Roser ^{[3
]}

Dominguez, Carlos ^{[3
]}

机构：

[1] Univ Politecn Valencia, Photon Res Labs, C Camino Vera S-N, Valencia 46021, Spain

[2] VLC Photon SL, R&D Dept, C Camino Vera S-N, Valencia 46021, Spain

[3] CSIC, IMB, CNM, GTQ, Barcelona 08193, Spain

来源：

SENSORS | 2017年 / 17卷 / 09期

基金：

欧盟地平线“2020”;

关键词：

silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer; FREQUENCY COMB GENERATION; WAVE-GUIDE IMMUNOSENSOR; SUPERCONTINUUM GENERATION; REFRACTIVE-INDEX; HIGH-CONFINEMENT; PERFORMANCE; MODULATION; FILMS;

D O I：

10.3390/s17092088

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

引用

页数：25

共 70 条

[1]

[Anonymous], INTRO SPLINES USE CO

[2]

[Anonymous], SI SILICON SILICON N

[3]

[Anonymous], 2017, 2017 19 INT C TRANSP, DOI DOI 10.1109/ICTON.2017.8024870

[4]

Baets R., OPTICAL FIBER COMMUN, P1, DOI DOI 10.1364/OFC.2016.TH3J.1

[5] Planar waveguides with less than 0.1 dB/m propagation loss fabricated with wafer bonding [J].

Bauters, Jared F. ;

Heck, Martijn J. R. ;

John, Demis D. ;

Barton, Jonathon S. ;

Bruinink, Christiaan M. ;

Leinse, Arne ;

Heideman, Rene G. ;

Blumenthal, Daniel J. ;

Bowers, John E. .

OPTICS EXPRESS, 2011, 19 (24) :24090-24101

[6] Ultra-low-loss high-aspect-ratio Si3N4 waveguides [J].

Bauters, Jared F. ;

Heck, Martijn J. R. ;

John, Demis ;

Dai, Daoxin ;

Tien, Ming-Chun ;

Barton, Jonathon S. ;

Leinse, Arne ;

Heideman, Rene G. ;

Blumenthal, Daniel J. ;

Bowers, John E. .

OPTICS EXPRESS, 2011, 19 (04) :3163-3174

[7] Dispersion engineered silicon nitride waveguides by geometrical and refractive-index optimization [J].

Boggio, J. M. Chavez ;

Bodenmueller, D. ;

Fremberg, T. ;

Haynes, R. ;

Roth, M. M. ;

Eisermann, R. ;

Lisker, M. ;

Zimmermann, L. ;

Boehm, M. .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 2014, 31 (11) :2846-2857

[8]

Bru L., 2016, P EUR C INT OPT WARS

[9] Integrated Microwave Photonic Filter on a Hybrid Silicon Platform [J].

Chen, Hui-Wen ;

Fang, Alexander W. ;

Peters, Jonathan D. ;

Wang, Zhi ;

Bovington, Jock ;

Liang, Di ;

Bowers, John E. .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2010, 58 (11) :3213-3219

[10] High-contrast, all-silicon waveguiding platform for ultra-broadband mid-infrared photonics [J].

Chiles, Jeff ;

Khan, Saeed ;

Ma, Jichi ;

Fathpour, Sasan .

APPLIED PHYSICS LETTERS, 2013, 103 (15)

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