Design of multilayered SiON strip waveguide for polarizer applications

被引：0
作者：
Priye, Vishnu [1 ]
Prasad, Janardan [1 ]
Anamika [1 ]
机构：
[1] Indian Sch Mines, Dept Elect Engn, Dhanbad 826004, Bihar, India
来源：
INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XVI | 2012年 / 8264卷
关键词：
Optical Polarizer; TE-pass Polarizer; Multilayer Waveguide; Silicon Oxynitride Waveguide; Semiconductor Waveguide; Strip Waveguide; BUFFER LAYER;
D O I：
10.1117/12.907921
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A four layered strip waveguide grown on silicon substrate and having a silicon oxynitride (SiON) guiding film with silicon oxide (SiO2) as buffer and cover is proposed and analyzed through transfer matrix formulation and effective index method. Dependence of polarization characteristic on waveguide parameters such as refractive index of SiON, buffer thickness and aspect ratio (b/a) of the strip waveguide are investigated. It is shown that by selecting an optimal combination of different waveguide parameters, a TE-mode polarizer having polarization extinction ratio of 200 dB and insertion loss of less than 1 dB/cm can be realized.
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页数：7
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