Effect of substrate on phase formation and surface morphology of sol-gel lead-free KNbO3, NaNbO3, and K0.5Na0.5NbO3 thin films

Environmentally acceptable lead-free ferroelectric KNbO3 (KN) or NaNbO3 (NN) and K0.5Na0.5NbO3 (KNN) thin films were prepared using a modified sol-gel method by mixing potassium acetate or sodium acetate or both with the Nb-tartrate complex, deposited on the Pt/Al2O3 and Pt/SiO2/Si substrates by a spin-coating method and sintered at 650A degrees C. X-ray diffraction (XRD) analysis indicated that the NN and KNN films on the Pt/SiO2/Si substrate possessed a single perovskite phase, while NN and KNN films on the Pt/Al2O3 substrate contained a small amount of secondary pyrochlore phase, as did KN films on both substrates. Scanning electron microscopic (SEM) and atomic force microscopic (AFM) analyses confirmed that roughness R (q) of the thin KNN/Pt/SiO2/Si film (a parts per thousand 7.4 nm) was significantly lower than that of the KNN/Pt/Al2O3 film (a parts per thousand 15 nm). The heterogeneous microstructure composed of small spherical and larger needle-like or cuboidal particles were observed in the KN and NN films on both substrates. The homogeneous microstructure of the KNN thin film on the Pt/SiO2/Si substrate was smoother and contained finer spherical particles (a parts per thousand 50 nm) than on Pt/Al2O3 substrates (a parts per thousand 100 nm). The effect of different substrates on the surface morphology of thin films was confirmed.