Mechanical properties of arc-evaporated CrN coatings. Part II: intrinsic film hardness and composite hardness

被引:9
作者
Ichimura, H [1 ]
Ishii, Y [1 ]
机构
[1] Sumitomo Met Min Co Ltd, Cent Res Lab, Ichikawa, Chiba, Japan
关键词
composite hardness; intrinsic hardness; CrN coating; Vickers indentation;
D O I
10.1016/S0257-8972(01)01289-0
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A systematic experimental investigation of the composite hardness of CrN coatings with different thickness on metal substrates with different hardness was carried out. The hardness response of the samples was studied over a range of applied loads between 100 and 2000 gf in Vickers tests. The measured hardness was analyzed as the function of the film thickness, the indentation size, and the substrate hardness based on the composite hardness models derived from the volume fraction law. The intrinsic hardness of CrN films, which was separate from the measured composite hardness, was independent of the coating thickness and given as a function of the indentation diagonal length. The '1/10th rule', which is considered the critical ratio of indentation depth to film thickness to evaluate the film hardness of coating systems has been analyzed from the plastic deformation theory for indentation, and it was analytically expressed by the functions of hardness and elastic modulus. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:94 / 100
页数:7
相关论文
共 16 条
[1]   Microstructural evolution during tempering of arc-evaporated Cr-N coatings [J].
Almer, J ;
Odén, M ;
Hultman, L ;
Håkansson, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2000, 18 (01) :121-130
[2]   ANALYSIS OF ELASTIC AND PLASTIC-DEFORMATION ASSOCIATED WITH INDENTATION TESTING OF THIN-FILMS ON SUBSTRATES [J].
BHATTACHARYA, AK ;
NIX, WD .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1988, 24 (12) :1287-1298
[3]  
Buckle H., 1973, The science of hardness testing and its research applications, P453
[4]   SURFACE SOFTENING IN SILICON BY ION-IMPLANTATION [J].
BURNETT, PJ ;
PAGE, TF .
JOURNAL OF MATERIALS SCIENCE, 1984, 19 (03) :845-860
[5]   THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .1. MODELING OF HARDNESS BEHAVIOR [J].
BURNETT, PJ ;
RICKERBY, DS .
THIN SOLID FILMS, 1987, 148 (01) :41-50
[6]   Performance of chromium nitride based coatings under plastic processing conditions [J].
Cunha, L ;
Andritschky, M ;
Pischow, K ;
Wang, Z ;
Zarychta, A ;
Miranda, AS ;
Cunha, AM .
SURFACE & COATINGS TECHNOLOGY, 2000, 133 :61-67
[7]  
ESAKA F, 1990, J VASC SCI TECHNOL A, V8, P3909
[8]   Hardness measurement of thin films: Separation from composite hardness [J].
He, JL ;
Li, WZ ;
Li, HD .
APPLIED PHYSICS LETTERS, 1996, 69 (10) :1402-1404
[9]   Structure, hardness, and tribological properties of reactive magnetron sputtered chromium nitride films [J].
He, XM ;
Baker, N ;
Kehler, BA ;
Walter, KC ;
Nastasi, M ;
Nakamura, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (01) :30-36
[10]   The composite and film hardness of TiN coatings prepared by cathodic arc evaporation [J].
Ichimura, H ;
Rodriguez, FM ;
Rodrigo, A .
SURFACE & COATINGS TECHNOLOGY, 2000, 127 (2-3) :138-143