Hydrothermal synthesis and characterization of In2O3-ZnGa2O4 nanocomposites and their application in IGZO ceramics

被引:8
|
作者
Liu, Yang [1 ,2 ]
Zhang, Yu [2 ]
Qiu, Chen [2 ]
Qi, Chao [2 ]
Sun, Benshuang [2 ]
Zeng, Xueyun [2 ]
Zhu, Jinpeng [2 ]
Shu, Yongchun [2 ]
He, Jilin [2 ]
机构
[1] Nankai Univ, TEDA Inst Appl Phys, Tianjin 300457, Peoples R China
[2] Zhengzhou Univ, Henan Prov Ind Technol Res Inst Resources & Mat, Zhengzhou 450001, Henan, Peoples R China
关键词
IGZO; Nanocomposites; Crystal structure; Ceramics; PHOTOCATALYTIC ACTIVITY; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; ZNGA2O4; NANOPARTICLES; TEMPERATURE; PERFORMANCE; POWDER;
D O I
10.1016/j.ceramint.2018.11.113
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Poly-crystalline In2O3-ZnGa2O4 nanocomposites were successfully synthesized by hydrothermal method with a mixed solution of In, Ga and Zn nitrates with equal mole ratio (In: Ga: Zn = 1:1:1) and the ammonia was used as the precipitant. The effects of hydrothermal temperature and pH value of the mixed solution on the properties of the nanocomposites were investigated. The microstructure of the prepared In2O3-ZnGa2O4 nanocomposites was characterized by SEM and TEM, respectively. The growth mechanisms of In2O3-ZnGa2O4 nanocomposites were also preliminarily discussed in this study. Results reveal that the IGZO ceramics prepared by In2O3-ZnGa2O4 nanocomposites own a high relative density of 99.5% and low resistivity of 1.2 m Omega.cm, which can be applied to the preparation of IGZO thin film with superior performance.
引用
收藏
页码:4381 / 4391
页数:11
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