Fabrication of Plasmonic Nanopore Array for Biomolecule Sensor

Recently there have been tremendous interests about the single molecule translocation through the SiN nanopore array. For DNA translocation and characterization, SiN nanopore array is easy to fabricate with high energy electron beam exposure. It is well known that the metallic nanopore can provide the huge enhancement, 10(6) fold increase of the electromagnetic field at the metallic nanopore due to "hot spot" effect. In addition, the fabricated plasmonic micro device provides huge photon transmission through the fabricated nanochannel. In this report, we microfabricated the plasmonic nanopore with similar to 10(1) nm on top of the micronsize pyramidal structure for translocation and optical characterization using conventional microfabrication process and electron beam heating. The reduced Au nanopore due to electron beam heating is found to provide the huge optical transmission resulted in the huge photonic pressure gradient between the free space and nanopore inside. The huge pressure gradient can be attributed to the resonance transmission between the fabricated V groove cavity and the nanosize waveguide formed during the metal deposition. This fabricated plasmonic nano-aperture device can be utilized as bio-molecule translocation and optical characterization.