A piezo-thermal probe for thermomechanical analysis

被引：14

作者：

Gaitas, Angelo ^{[1
,2
]}

Gianchandani, Sachi ^{[1
]}

Zhu, Weibin ^{[1
]}

机构：

[1] PicoCal Inc, Ann Arbor, MI 48103 USA

[2] Delft Univ Technol, NL-2628 CD Delft, Netherlands

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2011年 / 82卷 / 05期

基金：

美国国家科学基金会;

关键词：

ATOMIC-FORCE MICROSCOPE; STIFFNESS SILICON CANTILEVERS; INTERFACE CIRCUIT; HOT-TIP; TEMPERATURE; CALIBRATION; RESOLUTION; SENSORS; SYSTEM;

D O I：

10.1063/1.3587624

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thermomechanical analysis (TMA) is widely used to characterize materials and determine transition temperatures and thermal expansion coefficients. Atomic-force microscopy (AFM) microcantilevers have been used for TMA. We have developed a micromachined probe that includes two embedded sensors: one for measuring the mechanical movement of the probe (deflection) and another for providing localized heating. The new probe reduces costs and complexity and allow for portability thereby eliminating the need for an AFM. The sensitivity of the deflection element ((Delta R/R)/deflection) is 0.1 ppm/nm and its gauge factor is 3.24. The melting temperature of naphthalene is measured near 78.5 degrees C. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3587624]

引用

页数：4

共 28 条

[1] IMPROVED ATOMIC FORCE MICROSCOPE IMAGES USING MICROCANTILEVERS WITH SHARP TIPS [J].

AKAMINE, S ;

BARRETT, RC ;

QUATE, CF .

APPLIED PHYSICS LETTERS, 1990, 57 (03) :316-318

[2]

Blaine R. L., 1999, P 27 C N AM THERM AN

[3] Polymeric mechanical sensors with integrated readout in a microfluidic system [J].

Calleja, M ;

Rasmussen, P ;

Johansson, A ;

Boisen, A .

SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2, 2003, 5116 :314-321

[4] Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope [J].

Chui, BW ;

Stowe, TD ;

Kenny, TW ;

Mamin, HJ ;

Terris, BD ;

Rugar, D .

APPLIED PHYSICS LETTERS, 1996, 69 (18) :2767-2769

[5] Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high-density AFM thermomechanical data storage [J].

Chui, BW ;

Stowe, TD ;

Ju, YS ;

Goodson, KE ;

Kenny, TW ;

Mamin, HJ ;

Terris, BD ;

Ried, RP ;

Rugar, D .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (01) :69-78

[6] Calibration of micro-thermal analysis for the detection of glass transition temperatures and melting points - Repeatability and reproducibility [J].

Fischer, H. .

JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY, 2008, 92 (02) :625-630

[7] Thermal probe measurements of the glass transition temperature for ultrathin polymer films as a function of thickness [J].

Fryer, DS ;

Nealey, PF ;

de Pablo, JJ .

MACROMOLECULES, 2000, 33 (17) :6439-6447

[8] Characterization of room temperature metal microbolometers near the metal-insulator transition regime for scanning thermal microscopy [J].

Gaitas, Angelo ;

Zhu, Weibin ;

Gulari, Ning ;

Covington, Elizabeth ;

Kurdak, Cagliyan .

APPLIED PHYSICS LETTERS, 2009, 95 (15)

[9] Highly localized thermal, mechanical, and spectroscopic characterization of polymers using miniaturized thermal probes [J].

Hammiche, A ;

Bozec, L ;

Conroy, M ;

Pollock, HM ;

Mills, G ;

Weaver, JMR ;

Price, DM ;

Reading, M ;

Hourston, DJ ;

Song, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1322-1332

[10] Scanning thermal microscopy: Subsurface imaging, thermal mapping of polymer blends, and localized calorimetry [J].

Hammiche, A ;

Hourston, DJ ;

Pollock, HM ;

Reading, M ;

Song, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (02) :1486-1491

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