Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

被引：155

作者：

Kiwa, T

Tonouchi, M

Yamashita, M

Kawase, K

机构：

[1] Osaka Univ, Res Ctr Supercond Photon, Suita, Osaka 5650871, Japan

[2] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan

来源：

OPTICS LETTERS | 2003年 / 28卷 / 21期

关键词：

D O I：

10.1364/OL.28.002058

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection. (C) 2003 Optical Society of America.

引用

页码：2058 / 2060

页数：3

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