Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

被引：156
作者：
Kiwa, T
Tonouchi, M
Yamashita, M
Kawase, K
机构：
[1] Osaka Univ, Res Ctr Supercond Photon, Suita, Osaka 5650871, Japan
[2] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
来源：
OPTICS LETTERS | 2003年 / 28卷 / 21期
关键词：
D O I：
10.1364/OL.28.002058
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection. (C) 2003 Optical Society of America.
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页码：2058 / 2060
页数：3
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