Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits

被引:155
作者
Kiwa, T
Tonouchi, M
Yamashita, M
Kawase, K
机构
[1] Osaka Univ, Res Ctr Supercond Photon, Suita, Osaka 5650871, Japan
[2] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
关键词
D O I
10.1364/OL.28.002058
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection. (C) 2003 Optical Society of America.
引用
收藏
页码:2058 / 2060
页数:3
相关论文
共 16 条
[1]  
[Anonymous], 2003, SENSING TERAHERTZ RA
[2]   COHERENT TIME-DOMAIN FAR-INFRARED SPECTROSCOPY [J].
AUSTON, DH ;
CHEUNG, KP .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1985, 2 (04) :606-612
[3]   Thermal laser stimulation and NB-OBIC techniques applied to ESD defect localization [J].
Beauchêne, T ;
Lewis, D ;
Beaudoin, F ;
Pouget, V ;
Desplats, R ;
Fouillat, P ;
Perdu, P ;
Bafleur, M ;
Tremouilles, D .
MICROELECTRONICS RELIABILITY, 2003, 43 (03) :439-444
[4]   Terahertz emission from electric field singularities in biased semiconductors [J].
Brener, I ;
Dykaar, D ;
Frommer, A ;
Pfeiffer, LN ;
Lopata, J ;
Wynn, J ;
West, K ;
Nuss, MC .
OPTICS LETTERS, 1996, 21 (23) :1924-1926
[5]   Materials for terahertz science and technology [J].
Ferguson, B ;
Zhang, XC .
NATURE MATERIALS, 2002, 1 (01) :26-33
[6]   T-ray computed tomography [J].
Ferguson, B ;
Wang, SH ;
Gray, D ;
Abbot, D ;
Zhang, XC .
OPTICS LETTERS, 2002, 27 (15) :1312-1314
[7]   THZ TIME-DOMAIN SPECTROSCOPY OF HIGH-TC SUBSTRATES [J].
GRISCHKOWSKY, D ;
KEIDING, S .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1055-1057
[8]   FAR-INFRARED TIME-DOMAIN SPECTROSCOPY WITH TERAHERTZ BEAMS OF DIELECTRICS AND SEMICONDUCTORS [J].
GRISCHKOWSKY, D ;
KEIDING, S ;
VANEXTER, M ;
FATTINGER, C .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1990, 7 (10) :2006-2015
[9]   IMAGING WITH TERAHERTZ WAVES [J].
HU, BB ;
NUSS, MC .
OPTICS LETTERS, 1995, 20 (16) :1716-&
[10]  
KAWABE R, 1999, P IEEE 7 INT C THZ E, P102