Preparation and characteristics of nickel oxide thin film by controlled growth with sequential surface chemical reactions

被引：142
作者：
Kumagai, H [1 ]
Matsumoto, M [1 ]
Toyoda, K [1 ]
Obara, M [1 ]
机构：
[1] KEIO UNIV,FAC SCI & TECHNOL,KOHOKU KU,YOKOHAMA,KANAGAWA 223,JAPAN
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1996年 / 15卷 / 12期
关键词：
D O I：
10.1007/BF00274914
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：1081 / 1083
页数：3
相关论文
共 14 条
[1]  
Born M., 1975, PRINCIPLES OPTICS
[2]   DEVELOPMENT OF NI TI MULTILAYER SUPERMIRRORS FOR NEUTRON OPTICS [J].
ELSENHANS, O ;
BONI, P ;
FRIEDLI, HP ;
GRIMMER, H ;
BUFFAT, P ;
LEIFER, K ;
SOCHTIG, J ;
ANDERSON, IS .
THIN SOLID FILMS, 1994, 246 (1-2) :110-119
[3]   LOW-TEMPERATURE GROWTH OF THIN-FILMS OF AL2O3 BY SEQUENTIAL SURFACE CHEMICAL-REACTION OF TRIMETHYLALUMINUM AND H2O2 [J].
FAN, JF ;
SUGIOKA, K ;
TOYODA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (6B) :L1139-L1141
[4]   NACL-TYPE OXIDE-FILMS PREPARED BY PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
FUJII, E ;
TOMOZAWA, A ;
FUJII, S ;
TORII, H ;
HATTORI, M ;
TAKAYAMA, R .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (10A) :L1448-L1450
[5]   MODULATED REFLECTION SPECTRA FOR THIN-FILMS OF NICKEL OXIDES AND OXYHYDROXIDES [J].
HARA, N ;
SUGIMOTO, K .
JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1983, 47 (01) :31-39
[6]   SEQUENTIAL SURFACE CHEMICAL-REACTION LIMITED GROWTH OF HIGH-QUALITY AL2O3 DIELECTRICS [J].
HIGASHI, GS ;
FLEMING, CG .
APPLIED PHYSICS LETTERS, 1989, 55 (19) :1963-1965
[7]   FABRICATION OF TITANIUM-OXIDE THIN-FILMS BY CONTROLLED GROWTH WITH SEQUENTIAL SURFACE CHEMICAL-REACTIONS [J].
KUMAGAI, H ;
MATSUMOTO, M ;
TOYODA, K ;
OBARA, M ;
SUZUKI, M .
THIN SOLID FILMS, 1995, 263 (01) :47-53
[8]   IN-SITU ELLIPSOMETRIC DIAGNOSTICS FOR CONTROLLED GROWTH OF METAL-OXIDES WITH SURFACE CHEMICAL-REACTIONS [J].
KUMAGAI, H ;
TOYODA, K .
APPLIED SURFACE SCIENCE, 1994, 82-3 (1-4) :481-486
[9]   FABRICATION OF MULTILAYERS WITH GROWTH CONTROLLED BY SEQUENTIAL SURFACE CHEMICAL-REACTIONS [J].
KUMAGAI, H ;
MATSUMOTO, M ;
KAWAMURA, Y ;
TOYODA, K ;
OBARA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (12B) :7086-7089
[10]   COMPARATIVE-STUDY OF AL2O3 OPTICAL CRYSTALLINE THIN-FILMS GROWN BY VAPOR COMBINATIONS OF AL(CH3)3/N2O AND AL(CH3)3/H2O2 [J].
KUMAGAI, H ;
TOYODA, K ;
MATSUMOTO, M ;
OBARA, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (12B) :6137-6140
12