PECVD process parameter optimization: towards increased hardness of diamond-like carbon thin films

被引：45
作者：
Ghadai, Ranjan Kumar [1 ,2 ]
Kalita, Kanak [3 ]
Mondal, Subhas Chandra [1 ]
Swain, Bibhu Prasad [4 ]
机构：
[1] Indian Inst Engn Sci & Technol, Mech Engn, Sibpur, Howrah, India
[2] Sikkim Manipal Univ, Sikkim Manipal Inst Technol, Mech Engn, Sikkim, India
[3] Indian Inst Engn Sci & Technol, Aerosp Engn & Appl Mech, Sibpur 711103, Howrah, India
[4] Sikkim Manipal Univ, Sikkim Manipal Inst Technol, Ctr Mat Sci & Nanotechnol, Sikkim, India
来源：
MATERIALS AND MANUFACTURING PROCESSES | 2018年 / 33卷 / 16期
关键词：
DLC; GA; mathematical models; optimization; PSO; statistical analysis; MECHANICAL-PROPERTIES; MICROSTRUCTURE; DLC;
D O I：
10.1080/10426914.2018.1512114
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond-like carbon thin film coatings are extensively used in manufacturing, medical and aerospace industries due to their excellent tribological, mechanical, optical and biological properties. Due to the non-linear relationship of each process parameter in the deposition process, it is difficult to determine the response results without conducting large numbers of experiments. To counter this, a carefully designed experimentation scheme along with two nature-inspired metaheuristic algorithms are used in the current study. Hydrogen flow rate, Argon-C2H2 flow rate and deposition temperature are used as the design variables for maximizing the thin film hardness.
引用
收藏
页码：1905 / 1913
页数：9
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