Analytical differential cross section of electron elastically scattered by solid targets in the energy range up to 100 keV

被引：8

作者：

Bentabet, A. ^{[1
]}

Chaoui, Z. ^{[2
]}

Aydin, A. ^{[3
]}

Azbouche, A. ^{[4
]}

机构：

[1] Bordj Bou Arreridj Univ Ctr, Inst Sci & Technol, SM Dept, Bordj Bou Arreridj 34000, Algeria

[2] Univ Setif, UFA Setif, Lab Optoelect & Devices, Setif 19000, Algeria

[3] Balikesir Univ, Fac Sci & Literature, Dept Phys, TR-10145 Balikesir, Turkey

[4] Nucl Res Ctr Algiers, Algiers, Algeria

来源：

VACUUM | 2010年 / 85卷 / 02期

关键词：

Electron elastic cross-section; Elastic scattering; Screening Rutherford cross section; Backscattering coefficient; Mean penetration depth; Monte Carlo simulation; MONTE-CARLO-SIMULATION; POSITRON BACKSCATTERING; IMPLANTATION PROFILES; PENETRATION DEPTHS; PROBABILITIES; COEFFICIENTS; TRANSMISSION; SURFACES; IONS;

D O I：

10.1016/j.vacuum.2010.05.004

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we propose a new approach to determine the adjustable parameters of differential elastic cross-section of Bentabet et al. approximation. The resultant approximation is an analytical expression that can be used to study the interaction of electron beams with solid targets. This approximation is applied for the energy range up to 100 keV, to calculate some quantities such as: the mean penetration depths, the mean number of wide angle collisions and the backscattering coefficient (BSC) of Al, Cu, Ag and Au semi-infinite solid targets. BSC was calculated by using both the Monte Carlo method and the Vicanek and Urbassek analytical model. The obtained results are compared with the experiment and good agreement is remarked. (C) 2010 Elsevier Ltd. All rights reserved.

引用

页码：156 / 159

页数：4

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