Polycrystalline ZrB2 coating prepared on graphite by chemical vapor deposition

被引:8
作者
Wang, Peng [1 ]
Qi, Yushi [2 ]
Zhou, Shanbao [1 ]
Hu, Ping [1 ]
Chen, Guiqing [1 ]
Zhang, Xinghong [1 ]
Han, Wenbo [1 ]
机构
[1] Harbin Inst Technol, Sci & Technol Adv Composites Special Environm Lab, Harbin 150001, Peoples R China
[2] Univ Jinan, Sch Mat & Engn, Jinan 250022, Peoples R China
来源
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS | 2016年 / 253卷 / 08期
基金
国家杰出青年科学基金; 中国国家自然科学基金;
关键词
chemical vapor deposition; coatings; zirconium diboride; ZrB2; TEMPERATURE CERAMIC COMPOSITES; CARBON/CARBON COMPOSITES; OXIDATION-RESISTANCE; THIN-FILMS; PROTECTIVE-COATINGS; ZIRCONIUM DIBORIDE; C/C COMPOSITES; BEHAVIOR; GROWTH; MICROSTRUCTURE;
D O I
10.1002/pssb.201552752
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Polycrystalline ZrB2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl4, BCl3, H-2, and Ar at 1200 degrees C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO2 and B2O3 detected on the surface of ZrB2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB2 grains. The feasibility of preparation of ZrB2 on graphite by CVD using ZrCl4, BCl3, and H-2 was verified. (C) 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:1590 / 1595
页数:6
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