Design and Implementation of High Frequency Power Supply with Constant Power Output for Plasma Applications

被引：0

作者：

Zhao, Jin ^{[1
]}

Zhang, Jianzhong ^{[1
]}

Din, Zakiud ^{[1
]}

Qian, Zhengguo ^{[1
]}

机构：

[1] Southeast Univ, Sch Elect Engn, Nanjing, Jiangsu, Peoples R China

来源：

2018 IEEE ENERGY CONVERSION CONGRESS AND EXPOSITION (ECCE) | 2018年

关键词：

high frequency; hybrid resonant tank; LCLC inverter; ZVS; constant power output; VOLTAGE-CANCELLATION CONTROL; RESONANT INVERTER; DRIVEN SYSTEM; DISCHARGE; CIRCUIT;

D O I：

暂无

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

In this paper, a full bridge inverter, connected with a hybrid LCLC resonant tank and controlled by the optimum asymmetrical voltage cancellation (OAVC) approach, is presented to achieve high frequency high voltage power supply for plasma applications. The zero voltage switching (ZVS) of each power switch can be achieved by operating the inverter above the resonant frequency of the LCLC tank, which is beneficial for increasing system efficiency and reducing heat sink volume. In addition, the relationship between the voltage, current and the maximum power are deduced so that the plasma loads are able to work near the maximum power point with relative parameters settings. For verification, a 1kW-prototype, operating at 100 KHz, is implemented in the laboratory, and experimental results are presented to validate the parameters design and control strategies.

引用

页码：6350 / 6355

页数：6

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