Light Emission from Highly-Strained Germanium for On-Chip Optical Interconnects

被引:1
作者
Nam, D. [1 ]
Sukhdeo, D. S. [1 ]
Dutt, B. R. [2 ,3 ]
Saraswat, K. C. [1 ]
机构
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[2] APIC Corp, Culver City, CA 90230 USA
[3] PhotonIC Corp, Culver City, CA 90230 USA
来源
SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES | 2014年 / 64卷 / 06期
关键词
SILICON; SI; GE; SUBSTRATE; LASER; GAIN; OPTOELECTRONICS; NANOMEMBRANES; FABRICATION; QUALITY;
D O I
10.1149/06406.0371ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
In this paper, we focus on developing an efficient silicon-compatible light emitter based on highly-strained germanium technology. We present various experimental results showing enhanced light emission from strained germanium. First, we describe a thin film membrane technique in which a large residual stress in a tungsten layer is used to induce a biaxial tensile strain in germanium membranes. Second, we introduce an approach to induce sufficiently large uniaxial strain to create a direct band gap in germanium (Ge) nanowires using geometrical amplification of a small pre-existing strain. Lastly, we present a novel way to mimic double-heterostructure behavior within a single material, further enhancing light emission from Ge by capturing photo-generated carriers in a strain-induced potential well. Throughout this paper we discuss the implications of these experimental achievements toward creating an efficient Ge laser for silicon-compatible optical interconnects.
引用
收藏
页码:371 / 381
页数:11
相关论文
共 44 条
[31]   Study of Carrier Statistics in Uniaxially Strained Ge for a Low-Threshold Ge Laser [J].
Nam, Donguk ;
Sukhdeo, David S. ;
Gupta, Shashank ;
Kang, Ju-Hyung ;
Brongersma, Mark L. ;
Saraswat, Krishna C. .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2014, 20 (04)
[32]   Strain-Induced Pseudoheterostructure Nanowires Confining Carriers at Room Temperature with Nanoscale-Tunable Band Profiles [J].
Nam, Donguk ;
Sukhdeo, David S. ;
Kang, Ju-Hyung ;
Petykiewicz, Jan ;
Lee, Jae Hyung ;
Jung, Woo Shik ;
Vuckovic, Jelena ;
Brongersma, Mark L. ;
Saraswat, Krishna C. .
NANO LETTERS, 2013, 13 (07) :3118-3123
[33]   Electroluminescence from strained germanium membranes and implications for an efficient Si-compatible laser [J].
Nam, Donguk ;
Sukhdeo, David ;
Cheng, Szu-Lin ;
Roy, Arunanshu ;
Huang, Kevin Chih-Yao ;
Brongersma, Mark ;
Nishi, Yoshio ;
Saraswat, Krishna .
APPLIED PHYSICS LETTERS, 2012, 100 (13)
[34]   Strained germanium thin film membrane on silicon substrate for optoelectronics [J].
Nam, Donguk ;
Sukhdeo, Devanand ;
Roy, Arunanshu ;
Balram, Krishna ;
Cheng, Szu-Lin ;
Huang, Kevin Chih-Yao ;
Yuan, Ze ;
Brongersma, Mark ;
Nishi, Yoshio ;
Miller, David ;
Saraswat, Krishna .
OPTICS EXPRESS, 2011, 19 (27) :25866-25872
[35]   Fabrication of high-quality p-MOSFET in Ge grown heteroepitaxially on Si [J].
Nayfeh, A ;
Chui, CO ;
Yonehara, T ;
Saraswat, KC .
IEEE ELECTRON DEVICE LETTERS, 2005, 26 (05) :311-313
[36]   Effects of hydrogen annealing on heteroepitaxial-Ge layers on Si: Surface roughness and electrical quality [J].
Nayfeh, A ;
Chui, CO ;
Saraswat, KC ;
Yonehara, T .
APPLIED PHYSICS LETTERS, 2004, 85 (14) :2815-2817
[37]   Direct-bandgap light-emitting germanium in tensilely strained nanomembranes [J].
Sanchez-Perez, Jose R. ;
Boztug, Cicek ;
Chen, Feng ;
Sudradjat, Faisal F. ;
Paskiewicz, Deborah M. ;
Jacobson, R. B. ;
Lagally, Max G. ;
Paiella, Roberto .
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA, 2011, 108 (47) :18893-18898
[38]  
Saraswat K.C., 1982, IEEE J SOLID-ST CIRC, V17, P275
[39]   Power-Dependent Raman Analysis of Highly Strained Si Nanobridges [J].
Sueess, M. J. ;
Minamisawa, R. A. ;
Geiger, R. ;
Bourdelle, K. K. ;
Sigg, H. ;
Spolenak, R. .
NANO LETTERS, 2014, 14 (03) :1249-1254
[40]  
Süess MJ, 2013, NAT PHOTONICS, V7, P466, DOI [10.1038/NPHOTON.2013.67, 10.1038/nphoton.2013.67]