Light Emission from Highly-Strained Germanium for On-Chip Optical Interconnects

被引:1
作者
Nam, D. [1 ]
Sukhdeo, D. S. [1 ]
Dutt, B. R. [2 ,3 ]
Saraswat, K. C. [1 ]
机构
[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[2] APIC Corp, Culver City, CA 90230 USA
[3] PhotonIC Corp, Culver City, CA 90230 USA
来源
SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES | 2014年 / 64卷 / 06期
关键词
SILICON; SI; GE; SUBSTRATE; LASER; GAIN; OPTOELECTRONICS; NANOMEMBRANES; FABRICATION; QUALITY;
D O I
10.1149/06406.0371ecst
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
In this paper, we focus on developing an efficient silicon-compatible light emitter based on highly-strained germanium technology. We present various experimental results showing enhanced light emission from strained germanium. First, we describe a thin film membrane technique in which a large residual stress in a tungsten layer is used to induce a biaxial tensile strain in germanium membranes. Second, we introduce an approach to induce sufficiently large uniaxial strain to create a direct band gap in germanium (Ge) nanowires using geometrical amplification of a small pre-existing strain. Lastly, we present a novel way to mimic double-heterostructure behavior within a single material, further enhancing light emission from Ge by capturing photo-generated carriers in a strain-induced potential well. Throughout this paper we discuss the implications of these experimental achievements toward creating an efficient Ge laser for silicon-compatible optical interconnects.
引用
收藏
页码:371 / 381
页数:11
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