Effect of Substrate Temperature on Microstructure and Magnetic Properties of Single-Layered FePt Films

被引:7
作者
Chen, S. C. [1 ,2 ]
Sun, T. H. [3 ]
Chang, C. L. [1 ,2 ]
Su, W. H. [1 ,2 ]
Shen, C. L. [4 ]
Chen, J. R. [3 ]
机构
[1] Ming Chi Univ Technol, Dept Mat Engn, Taipei 24301, Taiwan
[2] Ming Chi Univ Technol, Ctr Thin Film Technol & Applicat, Taipei 24301, Taiwan
[3] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 30013, Taiwan
[4] Natl Taiwan Univ, Inst Mat Sci & Engn, Taipei 10617, Taiwan
关键词
Magnetic properties; perpendicular magnetic anisotropy; single-layered FePt films; substrate temperature; GRANULAR THIN-FILMS; THICKNESS; DEPENDENCE;
D O I
10.1109/TMAG.2011.2107315
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The single-layered Fe54Pt46 films with thickness of 30 nm are deposited directly on Si substrate at substrate temperatures (Ts) of 370 to 620 degrees C. The single-layered FePt films incline to random orientation as the Ts is lower than 570 degrees C. Upon increasing the substrate temperature to above 600 degrees C, the peak intensity of (001)(Fept) is much higher than that of (111)(Fept) and the perpendicular squareness (S-perpendicular to) is also much larger than that of in-plane squareness (S-//), indicating that the magnetic anisotropy of FePt film is changed from in-plane to out-of-plane. This finding reveals that a high perpendicular magnetic anisotropy of the FePt film can be obtained as the film is deposited at a higher substrate temperature of 620 degrees C. Its perpendicular coercivity (Hc(perpendicular to)), perpendicular squareness and magnetization at 20 kOe are as high as 14.0 kOe, 0.96 and 473 emu/cm(3), respectively.
引用
收藏
页码:524 / 527
页数:4
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