Polymer lenses with antireflection structures prepared using anodic porous alumina molds

被引:20
作者
Yanagishita, Takashi [1 ]
Hidaka, Takeshi [2 ]
Suzuki, Mari [2 ]
Masuda, Hideki [1 ]
机构
[1] Tokyo Metropolitan Univ, Dept Appl Chem, 1-1 Minamiosawa, Hachioji, Tokyo 1920397, Japan
[2] Olympus Co, 2951 Ishikawa Machi, Hachioji, Tokyo 1928507, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2016年 / 34卷 / 02期
关键词
FABRICATION; ARRAYS; SURFACES;
D O I
10.1116/1.4943044
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, a nanoimprinting process was used with anodic porous alumina as a mold to fabricate polymer lenses with antireflection structures. The antireflection structures were composed of a tapered pillar array, which served to suppress the reflectance of incident light of visible wavelengths. It was also demonstrated that polymer lenses with a tapered hole array on their surface could be obtained by injection molding using a Ni mold prepared through electroforming by depositing Ni with anodic porous alumina as a template. The polymer lenses with antireflection structures demonstrated in this study should be applicable for various types of functional optical devices, such as cameras, optical microscopes, etc. (C) 2016 American Vacuum Society.
引用
收藏
页数:5
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