Cross-Interaction in Cu/Sn/Co/Sn/Ni and Cu/Sn-Co/Co/Sn- Co/Ni Couples

被引:4
作者
Chen, Chih-chi [1 ,2 ]
Tseng, Yan-lun [1 ,2 ]
机构
[1] Chung Yuan Christian Univ, R&D Ctr Membrane Technol, Taoyuan 32023, Taiwan
[2] Chung Yuan Christian Univ, Dept Chem Engn, Taoyuan 32023, Taiwan
关键词
Diffusion barrier material; Cu; Co; Cu/low-k; INTERFACIAL REACTIONS; DIFFUSION COUPLES; SOLDER JOINT; CU; NI; SN; CO; COPPER; SYSTEM; LAYERS;
D O I
10.1007/s11664-014-3620-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study we examined cross-interactions of Cu/Co and Co/Ni by use of Cu/Sn/Co/Sn/Ni and Cu/Sn-0.04 wt.% Co/Co/Sn-0.04 wt.% Co/Ni couples. In the Cu/Sn/Co couple, Cu can diffuse through the pure Sn solder, and the (Cu, Co)(6)Sn-5 phase is formed at the Co side. The rate of consumption of Co decreases in the presence of Cu. Adding 0.04 wt.% Co to the pure Sn solder blocks diffusion of Cu; the (Cu, Co)(6)Sn-5 phase at the Co side is not observed, and the rate of Co consumption is increased. In the Co/Sn/Ni couple, no noticeable Co and Ni diffusion is observed. When 0.04 wt.% Co is added, the ternary (Ni, Co)Sn-4 phase is formed at the Ni side. These results indicate Co is an effective barrier to diffusion of Cu which can be used in flip chip packaging of Cu/low-k chips.
引用
收藏
页码:1021 / 1027
页数:7
相关论文
共 26 条
[1]   A study of nanoparticles in Sn-Ag based lead free solders [J].
Amagai, Masazumi .
MICROELECTRONICS RELIABILITY, 2008, 48 (01) :1-16
[2]   Cross-interaction between Ni and Cu across Sn layers with different thickness [J].
Chang, Chien Wei ;
Yang, Su Chun ;
Tu, Chun-Te ;
Kao, C. Robert .
JOURNAL OF ELECTRONIC MATERIALS, 2007, 36 (11) :1455-1461
[3]   Cross-interaction between Au and Cu in Au/Sn/Cu ternary diffusion couples [J].
Chang, CW ;
Lee, QP ;
Ho, CE ;
Kao, CR .
JOURNAL OF ELECTRONIC MATERIALS, 2006, 35 (02) :366-371
[4]   Phase equilibria of Sn-Co-Ni system and interfacial reactions in Sn/(Co, Ni) couples [J].
Chao, Yi-Hsiang ;
Chen, Sinn-Wen ;
Chang, Chih-Hong ;
Chen, Chih-Chi .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2008, 39A (03) :477-489
[5]   Co Solubility in Sn and Interfacial Reactions in Sn-Co/Ni Couples [J].
Chen, Sinn-Wen ;
Chen, Yu-Kai ;
Wu, Hsin-Jay ;
Huang, Yu-Chih ;
Chen, Chih-Ming .
JOURNAL OF ELECTRONIC MATERIALS, 2010, 39 (11) :2418-2428
[6]   Interfacial reactions in the Sn-(Cu)/Ni, Sn-(Ni)/Cu, and Sn/(Cu,Ni) systems [J].
Chen, SW ;
Wu, SH ;
Lee, SW .
JOURNAL OF ELECTRONIC MATERIALS, 2003, 32 (11) :1188-1194
[7]   Phase Equilibria of Sn-Co-Cu Ternary System [J].
Chen, Yu-Kai ;
Hsu, Chia-Ming ;
Chen, Sinn-Wen ;
Chen, Chih-Ming ;
Huang, Yu-Chih .
METALLURGICAL AND MATERIALS TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 2012, 43A (10) :3586-3595
[8]   Effects of Co and Ni addition on reactive diffusion between Sn-3.5Ag solder and Cu during soldering and annealing [J].
Gao, F ;
Takemoto, T ;
Nishikawa, H .
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2006, 420 (1-2) :39-46
[9]   On the mechanism of the binary Cu/Sn solder reaction -: art. no. 053106 [J].
Görlich, J ;
Schmitz, G ;
Tu, KN .
APPLIED PHYSICS LETTERS, 2005, 86 (05) :1-3
[10]   Reactions of solid copper with pure liquid tin and liquid tin saturated with copper [J].
Hayashi, A ;
Kao, CR ;
Chang, YA .
SCRIPTA MATERIALIA, 1997, 37 (04) :393-398