Two-frequency phase-shifting projection moire topography

被引:3
|
作者
Kim, SW [1 ]
Oh, JT [1 ]
Jung, MS [1 ]
Choi, YB [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Engn Mech, Taejon 305701, South Korea
来源
THREE-DIMENSIONAL IMAGING, OPTICAL METROLOGY, AND INSPECTION IV | 1998年 / 3520卷
关键词
projection moire topography; two-wavelength interferometry; absolute fringe orders; 2; pi-ambiguity; phase-shifting fringe analysis; three-dimensional profile measurement;
D O I
10.1117/12.334348
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Adopting phase-shifting technique in moire topography provides many advantages in measuring complex surface profiles with varying reflectance. However, still the so called 2 pi-ambiguity problem remains, which limits the maximum measurable step height difference between two neighboring sample points to be less than half the equivalent wavelength of moire fringes. To cope with the problem in this investigation, a two-wavelength scheme of projection moire topography is proposed along with necessary hardware design considerations. Test results prove that the proposed scheme is capable of finding absolute fringe orders automatically, so that the 2 pi-ambiguity problem can be effectively overcome so as to treat large step discontinuities in measured surfaces.
引用
收藏
页码:36 / 42
页数:7
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