Sensing characteristics of the organic vapors according to the reflectance spectrum in the porous silicon multilayer structure

被引：17

作者：

Kim, Han-Jung ^{[2
]}

Kim, Young-You ^{[1
]}

Lee, Ki-Won ^{[1
]}

机构：

[1] Kongju Natl Univ, Dept Phys, Gongju Si 314701, South Korea

[2] Korea Res Inst Stand & Sci, Div Convergence Technol, Taejon 305600, South Korea

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2011年 / 165卷 / 02期

关键词：

Porous silicon; Multilayer; Organic vapor; Gas sensor; Capillary condensation; Reflectance spectrum; OPTICAL-PROPERTIES; FABRICATION; DELIVERY; SENSORS; GAS;

D O I：

10.1016/j.sna.2010.10.016

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated a porous silicon multilayer and investigated its reflectance spectra before, during, and after exposure to various organic vapors. During exposure of the porous silicon multilayer to isopropanol, ethanol, methanol, and acetone vapors, the reflectance peak shifted toward longer wavelengths by about 5, 12, 26, and 39 nm. respectively. The shift of the reflectance peak arises from refractive index changes induced by capillary condensation of the organic vapor in the pores of the porous silicon multilayer. In addition, we observed that the shift value of the reflectance peak increased with increasing organic solvent concentration in the organic solvent-water mixture. After removing the organic vapor, the reflectance spectrum returned completely to its original state. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：276 / 279

页数：4

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