Enhanced heating in plasma bulk due to electron cyclotron resonance in weakly magnetized capacitively coupled plasmas

被引：8

作者：

Zhang, Quan-Zhi ^{[1
]}

Liu, Jia-Rui ^{[1
]}

Liu, Yong-Xin ^{[1
]}

Lu, Wen-Qi ^{[1
]}

Sun, Jing-Yu ^{[1
]}

Wang, You-Nian ^{[1
]}

机构：

[1] Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2022年 / 31卷 / 07期

基金：

中国国家自然科学基金;

关键词：

radio frequency; magnetized capacitively coupled plasmas; electron cyclotron resonance; POWER; MAGNETRON;

D O I：

10.1088/1361-6595/ac7903

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

An enhanced electron heating mechanism based on a resonance between the cyclotron motion of electrons and radio frequency (rf) electric field in the plasma bulk is reported in weakly magnetized capacitively coupled argon plasmas at low pressure. When the electron cyclotron frequency coincides with the applied power source frequency, the bulk electrons can continuously acquire energy from the background electric field within certain rf periods during the cyclotron motion, inducing overall distinct increase of excitation rate and electron temperature in the plasma bulk. This enhanced electron heating effect has been examined by a combination of kinetic particle simulations, experimental measurements, and an analytical model, and the dynamics of electrons are revealed at resonant conditions.

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页数：6

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