A method for positioning the focal spot location of two photon polymerization

被引：9

作者：

Zheng, Xu ^{[1
]}

Cheng, Kai ^{[1
]}

Zhou, Xiaoqin ^{[1
]}

Lin, Jieqiong ^{[2
]}

Jing, Xian ^{[2
]}

机构：

[1] Jilin Univ, Coll Mech Sci & Engn, Changchun 130012, Jilin, Peoples R China

[2] Changchun Univ Technol, Sch Mechatron Engn, Key Lab Micro Nano & Ultraprecis Mfg, Changchun 130012, Jilin, Peoples R China

来源：

AIP ADVANCES | 2017年 / 7卷 / 09期

基金：

中国国家自然科学基金;

关键词：

FABRICATION; NANOFABRICATION;

D O I：

10.1063/1.4986102

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 mu m x 200 mu m square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 mu m x 200 mu m square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height. (C) 2017 Author(s).

引用

页数：8

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