Evaluation of precipitate densities and capture radii from the analysis of precipitation kinetics

被引:24
|
作者
Hieslmair, H [1 ]
Istratov, AA [1 ]
Heiser, T [1 ]
Weber, ER [1 ]
机构
[1] Univ Calif Berkeley, Dept Mat Sci & Mineral Engn, Berkeley, CA 94720 USA
关键词
D O I
10.1063/1.368127
中图分类号
O59 [应用物理学];
学科分类号
摘要
The use of Ham's law in various forms to analyze precipitate site density is discussed. Ham's law is also applied to situations where the site density is of the same order as the solute concentration. While the results are general, this analysis uses iron precipitation and iron-boron pairing in silicon as example systems. The results of Ham's paper are reviewed and several implementations of Ham's Law are compared and fitted to experimental data. Iron-boron pairing is described using Ham's law and a capture radius of the boron of 6 nm is obtained. (C) 1998 American Institute of Physics. [S0021-8979(98)06314-2]
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页码:713 / 717
页数:5
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