Directing Block Copolymer Self-Assembly on Patterned Substrates

被引:32
|
作者
Gunkel, Ilja [1 ]
机构
[1] Univ Fribourg, Adolphe Merkle Inst, Chemin Verdiers 4, CH-1700 Fribourg, Switzerland
关键词
chemical and topographic patterning; chemoepitaxy; directed block copolymer self-assembly; graphoepitaxy; THIN-FILMS; ENABLING NANOTECHNOLOGY; CHEMICAL-PATTERNS; SOFT MATERIALS; NANOSTRUCTURES; LITHOGRAPHY; FABRICATION; TEMPLATES; ORDER; NANOLITHOGRAPHY;
D O I
10.1002/smll.201802872
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Self-assembling block copolymer films provide access to a variety of different nanostructured patterns in one, two, and three dimensions. However, in the absence of any templating, these nanostructures suffer from defects, often limiting utility. Directed block copolymer self-assembly uses patterned substrates that effectively suppress defect formation and allow the creation of desired patterns. The two main directed self-assembly techniques, chemoepitaxy and graphoepitaxy, employ chemically and topographically patterned substrates, respectively, to direct the block copolymer assembly in thin films. Their successful application in generating defect-free patterns in films of block copolymers exhibiting particular morphologies is summarized in this concept article. The possible role of directed self-assembly in extending nanostructured patterning from two to three dimensions is also discussed.
引用
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页数:8
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