CMOS Photonics: A Platform for Optoelectronics Integration

被引:5
|
作者
Pinguet, Thierry [1 ]
Gloeckner, Steffen [1 ]
Masini, Gianlorenzo [1 ]
Mekis, Attila [1 ]
机构
[1] Luxtera Inc, Carlsbad, CA 92011 USA
关键词
WAVE-GUIDE PHOTODETECTORS; SILICON; DETECTOR; GE;
D O I
10.1007/978-3-642-10506-7_8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We describe the intimate relationship between process, devices, and system design by examining the development of Luxtera's CMOS Photonics technology. We address the challenges of integrating optoeletronic elements, including germanium photodiodes, in a commercial CMOS process without significantly affecting the electronics performance and the manufacturability of the process. The common practices of the electronics design and manufacturing industry are applied to our optoelectronic technology; we discuss our device library and our design and testing infrastructure in support of the engineering of complex optoelectronic circuits and systems. Finally, we use a complete monolithically integrated wavelength division multiplexed 40 Gbps transceiver chip as an example of the application of our complete technology platform and the demonstration of its capabilities for optoelectronic integration.
引用
收藏
页码:187 / 216
页数:30
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