Design of piezoresistive MEMS-based accelerometer for integration with wireless sensing unit for structural monitoring

被引：78

作者：

Lynch, JP ^{[1
]}

Partridge, A

Law, KH

Kenny, TW

Kiremidjian, AS

Carryer, E

机构：

[1] Stanford Univ, Dept Civil & Environm Engn, Stanford, CA 94305 USA

[2] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA

[3] Stanford Univ, Dept Mech Engn, Stanford, CA 94305 USA

来源：

JOURNAL OF AEROSPACE ENGINEERING | 2003年 / 16卷 / 03期

关键词：

monitoring; sensors; structural response; acoustic measurement;

D O I：

10.1061/(ASCE)0893-1321(2003)16:3(108)

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

The use of advanced embedded system technologies such as microelectromechanical system (MEMS) sensors and wireless communications hold great promise for measuring the response of civil structures to ambient and external disturbances. In this paper, the design of a high-performance, planar piezoresistive MEMS accelerometer is discussed in detail. The piezoresistive accelerometer possesses superior performance characteristics including low noise densities when measuring local structural responses characterized by high-frequency content. A low-cost wireless sensing unit, designed for automated structural monitoring, is utilized to record and wirelessly transmit measurements obtained by the piezoresistive accelerometer. To validate the performance of the wireless monitoring system including the interfaced piezoresistive accelerometer, a five degrees-of-freedom laboratory test structure is utilized.

引用

页码：108 / 114

页数：7

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