Automatic optical inspection system for the image quality of microlens array

An automatic optical inspection system for the image quality and light field of a microlens array is presented in this paper. For the inspection of microlens array, XY-Table is used to the positioning of micro-lens array. With a He-Ne laser beam as a probing light, the measured image will be shown on the screen. A CCD camera captures the image of the screen and sends the data to the computer to analyze the luminosity function and uniformity. The noise disturbance of energy fluctuation of light field can be filtered by dividing the reference light intensity by the measured value. The light field measurement system checks the photometric quantity of each check point in sequence by distributing check points and several quality parameters are made for analysis to evaluate the uniformity of light field. The novel quality parameters are used to identify the quality of light field and provide a further understanding of the performance of microlens array.