Wavelength tuning of an antenna-coupled infrared microbolometer

被引：8
|
作者：
Gritz, MA
Metzler, M
Malocha, D
Abdel-Rahman, M
Monacelli, B
Zummo, G
Boreman, GD
机构：
[1] Raytheon Co, Space & Airborne Syst, Elect Warfare Syst, Golden, CA 93117 USA
[2] Cornell Univ, Cornell Nanoscale Facil, Ithaca, NY 14853 USA
[3] Univ Cent Florida, Dept Elect & Comp Engn, Orlando, FL 32816 USA
[4] Univ Cent Florida, CREOL, Sch Opt, Orlando, FL 32816 USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 06期
关键词：
D O I：
10.1116/1.1813465
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.15 mum near 10 mum. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees with measured results. (C) 2004 Ame rican Vacuum Society.
引用
收藏
页码：3133 / 3136
页数：4
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