Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

被引：31

作者：

Cui, Jianlei ^{[1
,2
,3
,4
,5
,6
]}

Zhang, Jianwei ^{[1
,2
,3
,4
,6
]}

Barayavuga, Theogene ^{[1
,6
]}

Wang, Xuewen ^{[1
,6
]}

He, Xiaoqiao ^{[5
,7
]}

Yang, Lijun ^{[4
]}

Xie, Hui ^{[4
]}

Mei, Xuesong ^{[6
]}

Wang, Wenjun ^{[6
]}

机构：

[1] Harbin Inst Technol, State Key Lab Adv Welding & Joining, Harbin, Heilongjiang, Peoples R China

[2] Fudan Univ, State Key Lab Surface Phys, Shanghai, Peoples R China

[3] Fudan Univ, Dept Phys, Shanghai, Peoples R China

[4] Harbin Inst Technol, State Key Lab Robot & Syst, Harbin, Heilongjiang, Peoples R China

[5] City Univ Hong Kong, Dept Architecture & Civil Engn, Tat Chee Ave, Kowloon, Hong Kong, Peoples R China

[6] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China

[7] City Univ Hong Kong, Ctr Adv Struct Mat, Shenzhen Res Inst, Shenzhen, Peoples R China

来源：

INTEGRATED FERROELECTRICS | 2017年 / 179卷 / 01期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

Nanofabrication; AFM; continuous laser; irradiation; OPTICAL-FIBER PROBE; DIP-PEN NANOLITHOGRAPHY; FIELD ENHANCEMENT; CARBON NANOTUBES; TOP-DOWN; MODE; NANOMANIPULATION; NANOPARTICLES; NANODOTS; CREATION;

D O I：

10.1080/10584587.2017.1331333

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Based on the near-field optical lithography with the metallic AFM tip irradiated by pulse laser, the nanofabrication is proposed with the thermal AFM tip irradiated by continuous laser. The corresponding electric and thermal fields are calculated and simulated to reveal the mechanism. With the thermal AFM tip, the nanostructures can be fabricated with the thermal melting and mechanical extrusion effects based on the thermal expansion effect of the metallic AFM probe.

引用

页码：140 / 147

页数：8

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