Electrochemically replicated smooth aluminum foils for anodic alumina nanochannel arrays

被引：6

作者：

Biring, Sajal ^{[1
,2
]}

Tsai, Kun-Tong ^{[1
]}

Sur, Ujjal Kumar ^{[1
]}

Wang, Yuh-Lin ^{[1
,3
]}

机构：

[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 10617, Taiwan

[2] Natl Tsing Hua Univ, Taiwan Int Grad Program, Dept Chem, Hsinchu, Taiwan

[3] Natl Taiwan Univ, Dept Phys, Taipei 10617, Taiwan

来源：

NANOTECHNOLOGY | 2008年 / 19卷 / 01期

关键词：

D O I：

10.1088/0957-4484/19/01/015304

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A fast electrochemical replication technique has been developed to fabricate large-scale ultra-smooth aluminum foils by exploiting readily available large-scale smooth silicon wafers as the masters. Since the adhesion of aluminum on silicon depends on the time of surface pretreatment in water, it is possible to either detach the replicated aluminum from the silicon master without damaging the replicated aluminum and master or integrate the aluminum film to the silicon substrate. Replicated ultra-smooth aluminum foils are used for the growth of both self-organized and lithographically guided long-range ordered arrays of anodic alumina nanochannels without any polishing pretreatment.

引用

页数：5

共 23 条

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