A heat-resistance and high-sensitivity acoustic pressure sensor based on aluminum-polyimide diaphragm

被引：17

作者：

Li, Xinxin ^{[1
]}

Zhen, Shenglai ^{[1
]}

Qian, Kai ^{[2
]}

Liang, Xiudong ^{[1
]}

Wang, Xiaoguang ^{[1
]}

Shi, Jinhui ^{[1
]}

Wu, Xuqiang ^{[1
]}

Yu, Benli ^{[1
]}

机构：

[1] Anhui Univ, Key Lab Optoelect Informat Acquisit & Manipulat, Hefei 230601, Anhui, Peoples R China

[2] Hubei Univ Nationalities, Sch Informat Engn, Enshi 445000, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2018年 / 279卷

基金：

国家重点研发计划; 中国国家自然科学基金;

关键词：

Optical fiber sensor; Aluminum-polyimide diaphragm; Heat-resistance; Long-term stability; GRAPHENE DIAPHRAGM;

D O I：

10.1016/j.sna.2018.05.043

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fiber-optic acoustic pressure sensor based on aluminum-polyimide diaphragm is proposed in this paper. The sensing diaphragm exhibits excellent properties including heat resistance and long-term stability (4 months). Together with hybrid configuration of Mach-Zehnder and Sagnac interferometer with triple detection passive demodulation algorithm, the sensor can measure the absolute amplitude of acoustic pressure. The sensor has a high sensitivity of 110 nm/Pa with the acoustic pressure amplitude of 2.05 mPa-7.15 Pa and gives a minimum detectable pressure of 37.7 mu Pa/Hz(1/2) at 4 kHz. The sensor also demonstrates a flat frequency response in the range of 600 Hz-6 kHz and is expected to be used for weak acoustic pressure sensing and photo-acoustic spectroscopy. (C) 2018 Elsevier B.V. All rights reserved.

引用

页码：75 / 78

页数：4

共 9 条

[1] External fibre Fabry-Perot acoustic sensor based on a photonic-crystal mirror [J].

Kilic, Onur ;

Digonnet, Michel ;

Kino, Gordon ;

Solgaard, Olav .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (10) :3049-3054

[2] High-Sensitivity Sensing Based on Plasmon-Induced Transparency [J].

Li, B. X. ;

Li, H. J. ;

Zeng, L. L. ;

Zhan, S. P. ;

He, Z. H. ;

Chen, Z. Q. ;

Xu, H. .

IEEE PHOTONICS JOURNAL, 2015, 7 (05)

[3] Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm [J].

Liu, Bin ;

Lin, Jie ;

Liu, Huan ;

Jin, An ;

Jin, Peng .

MICROELECTRONIC ENGINEERING, 2016, 166 :50-54

[4] Fiber-Optic Fabry-Perot Acoustic Sensor With Multilayer Graphene Diaphragm [J].

Ma, Jun ;

Xuan, Haifeng ;

Ho, Hoi Lut ;

Jin, Wei ;

Yang, Yuanhong ;

Fan, Shangchun .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (10) :932-935

[5] High-sensitivity fiber-tip pressure sensor with graphene diaphragm [J].

Ma, Jun ;

Jin, Wei ;

Ho, Hoi Lut ;

Dai, Ji Yan .

OPTICS LETTERS, 2012, 37 (13) :2493-2495

[6] Improved polyimide/metal adhesion by chemical modification approaches [J].

Ranucci, E ;

Sandgren, Å ;

Andronova, N ;

Albertsson, AC .

JOURNAL OF APPLIED POLYMER SCIENCE, 2001, 82 (08) :1971-1985

[7] Recent progress in fiber-optic extrinsic Fabry-Perot interferometric sensors [J].

Rao, Yun-Jiang .

OPTICAL FIBER TECHNOLOGY, 2006, 12 (03) :227-237

[8] Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm [J].

Xu, Feng ;

Shi, Jinhui ;

Gong, Kui ;

Li, Hefei ;

Hui, Rongqing ;

Yu, Benli .

OPTICS LETTERS, 2014, 39 (10) :2838-2840

[9] Miniature all-silica fiber optic pressure and acoustic sensors [J].

Xu, JC ;

Wang, XW ;

Cooper, KL ;

Wang, AB .

OPTICS LETTERS, 2005, 30 (24) :3269-3271

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