Scanning anode field emission microscopy analysis for studies of planar cathodes

被引:16
作者
Semet, V [1 ]
Mouton, R [1 ]
Binh, VT [1 ]
机构
[1] Univ Lyon 1, Equipe Emiss Elect, Lab Phys Mat Condensee & Nanostruct, CNRS, F-69622 Villeurbanne, France
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2005年 / 23卷 / 02期
关键词
D O I
10.1116/1.1857911
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In a scanning anode field emission microscope the field emission current is extracted by a small spherical anode brought, at micrometric proximity, in front of a planar cathode surface. Therefore, the field over the emission area is not uniform and direct quantitative interpretation from the total field emission current versus applied voltage is misleading. The potential distribution of the system composed of a sphere in front of a plane have been calculated to determine the field distribution over the surface in order to define the active field emitting zone and to extract the current density versus the local applied field from the measured total field emission current versus applied voltage characteristics. (c) 2005 American Vacuum Society.
引用
收藏
页码:671 / 675
页数:5
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