Determination of structure characteristics of heteroepitaxially grown thin films through X-ray diffraction line profile analysis

被引：0
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作者：
Sutta, P [1 ]
机构：
[1] Mil Acad, Fac Logist, Dept Phys, Liptovsky Mikulas 03119, Slovakia
来源：
HETEROSTRUCTURE EPITAXY AND DEVICES: HEAD '97 | 1998年 / 48卷
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页码：301 / 304
页数：4
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