共 29 条
- [12] Ikuta K., 1993, Proceedings. IEEE. Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.93CH3265-6), P42, DOI 10.1109/MEMSYS.1993.296949
- [13] Ikuta K., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P739, DOI 10.1109/MEMSYS.2000.838610
- [14] New micro stereo lithography for freely movable 3D micro structure - Super IH process with submicron resolution [J]. MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, : 290 - 295
- [15] Jeffery GB, 1915, P LOND MATH SOC, V14, P327