Force-controllable, optically driven micromachines fabricated by single-step two-photon micro stereolithography

被引:103
作者
Maruo, S [1 ]
Ikuta, K [1 ]
Korogi, H [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Nagoya, Aichi 4648603, Japan
关键词
micromanipulators; microturbine; optically driven micromachine; two-photon microstereolithography;
D O I
10.1109/JMEMS.2003.817894
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have fabricated optically driven micromechanisms and demonstrated their motion under optical force. All of the movable microcomponents are directly fabricated through an assembly-free process using the high-speed scanning of a femtosecond laser focused inside a photocurable resin. Since these movable micromachines are made from photocurable resin transparent to visible and near-infrared light, they can be driven by the force of optical trapping. We demonstrate a simple, versatile method for driving movable micromachines. Part of the movable component is optically trapped by a single laser beam and manipulated according to the desired trajectory. Various types of motion, including rotation and swinging are demonstrated. In addition, the optically driven micromachines can be force-controlled to femtonewton order by adjusting the position trapped by the laser beam. We demonstrated the femtonewton order force-controllable swing motion of micromanipulators. A microturbine was rotated by circular scanning of a trapping laser beam in a liquid. Such force-controllable optically driven micromachines are promising manipulation tools for biomolecules such as DNA and protein.
引用
收藏
页码:533 / 539
页数:7
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