Cosputtered composition-spread reproducibility established by high-throughput x-ray fluorescence

被引：7

作者：

Gregoire, John M. ^{[1
]}

Dale, Darren ^{[2
]}

Kazimirov, Alexander ^{[2
]}

DiSalvo, Francis J. ^{[3
]}

van Dover, R. Bruce ^{[1
]}

机构：

[1] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

[2] Cornell Univ, Cornell High Energy Synchrotron Source, Ithaca, NY 14853 USA

[3] Cornell Univ, Dept Chem & Chem Biol, Ithaca, NY 14853 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2010年 / 28卷 / 05期

基金：

美国国家卫生研究院; 美国国家科学基金会;

关键词：

All Open Access; Green;

D O I：

10.1116/1.3478668

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We describe the characterization of sputtered yttria-zirconia composition spread thin films by x-ray fluorescence (XRF). We also discuss our automated analysis of the XRF data, which was collected in a high throughput experiment at the Cornell High Energy Synchrotron Source. The results indicate that both the composition reproducibility of the library deposition and the composition measurements have a precision of better than 1 atomic percent. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3478668]

引用

页码：1279 / 1280

页数：2

共 5 条

[1] High throughput thin film materials science [J].

Barber, Z. H. ;

Blamire, M. G. .

MATERIALS SCIENCE AND TECHNOLOGY, 2008, 24 (07) :757-770

[2] High energy x-ray diffraction/x-ray fluorescence spectroscopy for high-throughput analysis of composition spread thin films [J].

Gregoire, John M. ;

Dale, Darren ;

Kazimirov, Alexander ;

DiSalvo, Francis J. ;

van Dover, R. Bruce .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (12)

[3] A multiplatform code for the analysis of energy-dispersive X-ray fluorescence spectra [J].

Sole, V. A. ;

Papillon, E. ;

Cotte, M. ;

Walter, Ph. ;

Susini, J. .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2007, 62 (01) :63-68

[4] The codeposited composition spread approach to high-throughput discovery/exploration of inorganic materials [J].

van Dover, RB ;

Schneemeyer, LF .

MACROMOLECULAR RAPID COMMUNICATIONS, 2004, 25 (01) :150-157

[5] Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition [J].

Xia, Bin ;

Chu, Yong S. ;

Gladfelter, Wayne L. .

SURFACE & COATINGS TECHNOLOGY, 2007, 201 (22-23) :9041-9045

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