Chemical and structural characterization of barium hexaferrite films deposited on 6H-SiC with and without MgO/BaM interwoven layers

被引:14
作者
Cai, Zhuhua
Chen, Zhaohui
Goodrich, Trevor L.
Harris, V. G.
Ziemer, Katherine S. [1 ]
机构
[1] Northeastern Univ, Dept Chem Engn, Boston, MA 02115 USA
[2] Northeastern Univ, Dept Elect & Comp Engn, Boston, MA 02115 USA
关键词
Si diffusion; XPS depth profile; PLD; barium ferrite; magnesium oxide; silicon carbide;
D O I
10.1016/j.jcrysgro.2007.06.031
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
High quality epitaxial barium hexaferrite (BaM) films with saturation magnetization of 4.3kG, coercivity of 389Oe, and FMR linewidth of 500 Oe, have been deposited by pulsed laser deposition on 6H-silicon carbide (SiC) single crystal substrates using an interwoven layer of magnesium oxide (MgO) and BaM of approximately 16nm thick. This paper presents a chemical and structural study of the intermediate stages of BaM film growth on the interwoven layers compared to intermediate stages of BaM film growth directly on a SiC substrate. The purpose of these experiments is to understand the role of the interwoven layers and thus further improve the magnetic properties of BaM integrated with SiC substrates. X-ray photoelectron spectroscopy surface analysis and depth profiling shows that the interwoven layers effectively eliminate silicon diffusion into the bulk BaM film, and prevent the Fe diffusion which reduces Fe/Ba ratios in films deposited without the interwoven layers. By comparing the initial stages of film growth on the MgO/BaM interwoven layers with film deposited with the same number of BaM shots on a bare SiC substrate, scanning electron microscopy and atomic force microscopy results suggest that the MgO/BaM interwoven layers promote two-dimensional growth and improve the crystallographic texture of the BaM films, likely through relief of the lattice mismatch. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:321 / 327
页数:7
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