High quality epitaxial barium hexaferrite (BaM) films with saturation magnetization of 4.3kG, coercivity of 389Oe, and FMR linewidth of 500 Oe, have been deposited by pulsed laser deposition on 6H-silicon carbide (SiC) single crystal substrates using an interwoven layer of magnesium oxide (MgO) and BaM of approximately 16nm thick. This paper presents a chemical and structural study of the intermediate stages of BaM film growth on the interwoven layers compared to intermediate stages of BaM film growth directly on a SiC substrate. The purpose of these experiments is to understand the role of the interwoven layers and thus further improve the magnetic properties of BaM integrated with SiC substrates. X-ray photoelectron spectroscopy surface analysis and depth profiling shows that the interwoven layers effectively eliminate silicon diffusion into the bulk BaM film, and prevent the Fe diffusion which reduces Fe/Ba ratios in films deposited without the interwoven layers. By comparing the initial stages of film growth on the MgO/BaM interwoven layers with film deposited with the same number of BaM shots on a bare SiC substrate, scanning electron microscopy and atomic force microscopy results suggest that the MgO/BaM interwoven layers promote two-dimensional growth and improve the crystallographic texture of the BaM films, likely through relief of the lattice mismatch. (c) 2007 Elsevier B.V. All rights reserved.