Advances in ion beam sputtered Sc2O3 for optical interference coatings

被引：17

作者：

Menoni, Carmen S. ^{[1
]}

Krous, Erik M. ^{[1
]}

Patel, Dinesh ^{[1
]}

Langston, Peter ^{[1
]}

Tollerud, Jonathan ^{[1
]}

Nguyen, Duy N. ^{[2
]}

Emmert, Luke A. ^{[2
]}

Markosyan, Ashot ^{[3
]}

Route, Roger ^{[3
]}

Fejer, Martin ^{[3
]}

Rudolph, Wolfgang ^{[2
]}

机构：

[1] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[2] Univ New Mexico, Dept Phys & Astron, Albuquerque, NM 87131 USA

[3] Stanford Univ, Dept Appl Phys, Ginzton Lab, Stanford, CA 94305 USA

来源：

LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2010 | 2010年 / 7842卷

关键词：

Scandia; ion beam sputtering; structural characterization; laser damage; SCANDIUM OXIDE; FILMS; DEPOSITION;

D O I：

10.1117/12.855604

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Scandium oxide is an attractive candidate for the engineering of interference coatings, although not widely explored. This paper describes the ion beam sputtering of Sc2O3. It is shown that the structural properties of the material are affected by the deposition conditions. Laser damage in different regimes of pulsewidths is investigated. These results show that the 1-on-1 laser damage fluence, in both the thermal and deterministic regimes, varies with deposition conditions but this is not the case for S-on-1, indicating that laser-induced defects are important.

引用

页数：12

共 21 条

[1] Reactive sputter deposition of tungsten nitride thin films [J].

Baker, CC ;

Shah, SI .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (05) :1699-1703

[2]

Cullity B.D., 1959, ELEMENTS XRAY DIFFRA

[3] ALD of scandium oxide from scandium Tris(N,N′-diisopropylacetamidinate) and water [J].

de Rouffignac, P ;

Yousef, AP ;

Kim, KH ;

Gordon, RG .

ELECTROCHEMICAL AND SOLID STATE LETTERS, 2006, 9 (06) :F45-F48

[4] Modeling the effect of native and laser-induced states on the dielectric breakdown of wide band gap optical materials by multiple subpicosecond laser pulses [J].

Emmert, Luke A. ;

Mero, Mark ;

Rudolph, Wolfgang .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (04)

[5] Scandia optical coatings for application at 351 nm [J].

Grosso, D ;

Sermon, PA .

THIN SOLID FILMS, 2000, 368 (01) :116-124

[6] REACTIVELY EVAPORATED FILMS OF SCANDIA AND YTTRIA [J].

HEITMANN, W .

APPLIED OPTICS, 1973, 12 (02) :394-397

[7] Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating [J].

Janicki, V. ;

Gaebler, D. ;

Wilbrandt, S. ;

Leitel, R. ;

Stenzel, O. ;

Kaiser, N. ;

Lappschies, M. ;

Goertz, B. ;

Ristau, D. ;

Rickers, C. ;

Vergoehl, M. .

APPLIED OPTICS, 2006, 45 (30) :7851-7857

[8]

Keldysh L. V., 1965, SOVIET PHYS JETP, V20

[9]

Krous Erik M., UNPUB

[10] Role of free carriers from two-photon absorption in Raman amplification in silicon-on-insulator waveguides [J].

Liang, TK ;

Tsang, HK .

APPLIED PHYSICS LETTERS, 2004, 84 (15) :2745-2747

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