Ultra-high-resolution and flexible display applications require high-performance oxide thin film transistors (TFTs) fabricated at low temperatures. This study fabricated low-temperature and solution-processed highmobility ZnSnO (ZTO) thin films and TFTs by a lightwave-activation annealing process. The effect of Sn content on the microstructures and electrical properties of lightwave-activated ZTO (LW-ZTO) films and TFTs was investigated. The lightwave-activation process triggered the efficient decomposition of chloride-based precursors and enhanced the performance of ZTO TFTs at a low temperature (230 degrees C). The optimized ZTO TFTs exhibited excellent electrical properties, including a high saturation mobility of 45.1 cm2/Vs and an on-current/off-current ratio of 105-106 at a low operating voltage of 3 V. Furthermore, the LW-ZTO devices demonstrated high operational stability with a small Vth shift of 0.231 V under bias stress for 5400 s. The performance of the ZTO TFTs was attributed to the low-temperature lightwave-activation process, stemming from the synergic effects of light and heat. These promising results highlight the potential applications of low-temperature lightwave-activated oxide transistors in next-generation cost-effective and low-power flexible electronics.
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Kim, Youn Goo
Kim, Taehun
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Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Kim, Taehun
Avis, Christophe
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Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Avis, Christophe
Lee, Seung-Hun
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Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Lee, Seung-Hun
Jang, Jin
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Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
机构:
CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Xu, Wangying
Wang, Han
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CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Wang, Han
Xie, Fangyan
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机构:
Sun Yat Sen Zhongshan Univ, Instrumental Anal & Res Ctr, Guangzhou, Guangdong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Xie, Fangyan
Chen, Jian
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Sun Yat Sen Zhongshan Univ, Instrumental Anal & Res Ctr, Guangzhou, Guangdong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Chen, Jian
Cao, Hongtao
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h-index: 0
机构:
Chinese Acad Sci, NIMTE, Div Funct Mat & Nano Devices, Ningbo, Zhejiang, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Cao, Hongtao
Xu, Jian-Bin
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CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Choi, Chang-Ho
Han, Seung-Yeol
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Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Oregon State Univ, Sch Chem Biol & Environm Engn, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Han, Seung-Yeol
Su, Yu-Wei
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Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
CSD Nano Inc, Corvallis, OR 97330 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Su, Yu-Wei
Fang, Zhen
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Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Fang, Zhen
Lin, Liang-Yu
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Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, TaiwanOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Lin, Liang-Yu
Cheng, Chun-Cheng
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Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, TaiwanOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Cheng, Chun-Cheng
Chang, Chih-hung
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Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Kim, Youn Goo
Kim, Taehun
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Kim, Taehun
Avis, Christophe
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Avis, Christophe
Lee, Seung-Hun
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
Lee, Seung-Hun
Jang, Jin
论文数: 0引用数: 0
h-index: 0
机构:
Kyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South KoreaKyung Hee Univ, Dept Informat Display, Adv Display Res Ctr, Seoul 130701, South Korea
机构:
CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Xu, Wangying
Wang, Han
论文数: 0引用数: 0
h-index: 0
机构:
CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Wang, Han
Xie, Fangyan
论文数: 0引用数: 0
h-index: 0
机构:
Sun Yat Sen Zhongshan Univ, Instrumental Anal & Res Ctr, Guangzhou, Guangdong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Xie, Fangyan
Chen, Jian
论文数: 0引用数: 0
h-index: 0
机构:
Sun Yat Sen Zhongshan Univ, Instrumental Anal & Res Ctr, Guangzhou, Guangdong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Chen, Jian
Cao, Hongtao
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, NIMTE, Div Funct Mat & Nano Devices, Ningbo, Zhejiang, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
Cao, Hongtao
Xu, Jian-Bin
论文数: 0引用数: 0
h-index: 0
机构:
CUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R ChinaCUHK, Dept Elect Engn, Mat Sci & Technol Res Ctr, Shatin, Hong Kong, Peoples R China
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Choi, Chang-Ho
Han, Seung-Yeol
论文数: 0引用数: 0
h-index: 0
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Oregon State Univ, Sch Chem Biol & Environm Engn, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Han, Seung-Yeol
Su, Yu-Wei
论文数: 0引用数: 0
h-index: 0
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
CSD Nano Inc, Corvallis, OR 97330 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Su, Yu-Wei
Fang, Zhen
论文数: 0引用数: 0
h-index: 0
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Fang, Zhen
Lin, Liang-Yu
论文数: 0引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, TaiwanOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Lin, Liang-Yu
Cheng, Chun-Cheng
论文数: 0引用数: 0
h-index: 0
机构:
Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30050, TaiwanOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA
Cheng, Chun-Cheng
Chang, Chih-hung
论文数: 0引用数: 0
h-index: 0
机构:
Oregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USAOregon State Univ, Oregon Proc Innovat Center, Microprod Breakthrough Inst, Corvallis, OR 97331 USA