Fabrication of metallic patterns on polydimethylsiloxane using transfer technology: application to MRI microcoils

被引：8

作者：

Couty, M. ^{[1
,2
]}

Nazeer, S. ^{[1
]}

Jelita, C. ^{[1
]}

Martincic, E. ^{[1
]}

Woytasik, M. ^{[1
]}

Ginefri, J-C. ^{[3
]}

Darrasse, L. ^{[3
]}

Tatoulian, M. ^{[2
]}

Dufour-Gergam, E. ^{[1
]}

机构：

[1] Univ Paris 11, Lab IEF, UMR 8622, CNRS, F-91405 Orsay, France

[2] ENSCP, EA3492, LGPPTS, F-75005 Paris, France

[3] Univ Paris 11, UMR 8081, CNRS, Lab IR4M, F-91405 Orsay, France

来源：

MICRO & NANO LETTERS | 2012年 / 7卷 / 06期

关键词：

POLY(DIMETHYLSILOXANE); FILMS;

D O I：

10.1049/mnl.2012.0271

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Despite the large use of this material in the microsystem field, fabrication of metallic patterns on polydimethylsiloxane (PDMS) still remains a challenge. In this Letter, we present a new process based on the transfer principle and report its application to MRI microcoils. These double-side structures are well aligned and the transfer yield is higher than 90%. The limit of the working range for these flexible coils is a bending radius of 2 mm, similar to the radius of the coil. The developed process opens a wide range of further applications for flexible devices.

引用

页码：519 / 522

页数：4

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