Neural network approximation of tip-abrasion effects in AFM imaging

The abrasion ( wear) of tips used in scanning force microscopy (SFM) directly influences SFM image quality and is therefore of great relevance to quantitative SFM measurements. The increasing implementation of automated SFM measurement schemes has become a strong driving force for increasing efforts towards the prediction of tip wear, as it needs to be ensured that the probe is exchanged before a level of tip wear is reached that adversely affects the measurement quality. In this paper, we describe the identification of tip abrasion in a system of SFM measurements. We attempt to model the tip-abrasion process as a concatenation of a mapping from the measured AFM data to a regression vector and a nonlinear mapping from the regressor space to the output space. The mapping is formed as a basis function expansion. Feedforward neural networks are used to approximate this mapping. The one-hidden layer network gave a good quality of fit for the training and test sets for the tip-abrasion system. We illustrate our method with AFM measurements of both fine periodic structures and randomly oriented sharp features and compare our neural network results with those obtained using other methods.